Online Detection Method for Inter-Electrode Gap in Micro ECM Based on Capacitance of Electric Double Layers

孔全存,李勇,朱效谷,佟浩,刘桂礼

DOI: https://doi.org/10.3969/j.issn.1672-6030.2013.06.010

2013-01-01

Abstract:In accordance with the asymmetric feature that the bottom area of tool electrode is far smaller than the surface of workpiece in micro electrochemical machining (micro ECM), and under the conditions that in water-based neutral salt the blunt electrolyte side-stream flushes in and that the metal electrode is in a passive state, the online detection method for the size of inter-electrode gap in micro ECM is presented based on the capacitance of electric double layers (EDL). On the premise that the external sensors are not added onto the micro-tool electrode and/or workpiece, the tendency that the capacitance value of EDL on the tool electrode/solution interface increases monotonously with the increase of the inter-electrode gap is utilized to realize the precise and quick online detection of inter-electrode gap. When the inter-electrode gap ranges from 0 to 100 μm under the side-stream flushing speed of 1.058 m/s, the size of inter-electrode gap in micro ECM can be detected within a few milliseconds. And the maximum relative error between the theoretical simulation and the experimental measurements is less than 10%, which can provide the necessary conditions for the high-precision, high-quality and stable machining in micro ECM.