Abstract:Multi-cluster tools are widely adopted in semiconductor manufacturing. When a process module (PM) at a step fails, a multi-cluster tool cannot complete the process recipe of work-in-process wafers and must be forced to enter a closedown process to be empty. To increase the throughput of a wafer fab, it is economically significant to shorten the failure-closedown process. However, due to the wafer residency time constraints, it is highly challenging to respond to a PM failure and find a corresponding optimal schedule. By assuming no parallel PM at a step, this work is the first to study this important issue for scheduling multi-cluster tools. We analyze the task sequences and synchronization conditions for robot activities to avoid deadlock in a shared buffer module. Upon these analyses, for process-dominant multi-cluster tools whose optimal steady-state schedule is known, algorithms are proposed to synthesize the proper sequences for robots in case of PM failures, then, a nonlinear program model is proposed to find an optimal schedule for the corresponding closedown process or decide no feasible solutions. The proposed model can uniformly deal with different scenarios of PM failures. Examples are given to illustrate the application of the proposed method. Note to Practitioners —In a wafer fab, there are hundreds, even thousands, of cluster tools. It is common that a failure of a processing module happens in a cluster tool. How to intelligently respond to such a random failure in a multi-cluster tool is an important issue in real-world production. This paper studies the scheduling problem of a multi-cluster tool in case of a failure at a PM. For a multi-cluster tool in case of a failure module, the proposed method can significantly reduce the loss of work-in-process wafers and shorten the closedown process.

Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing

Petri Net Modeling and One-Wafer Scheduling of Single-Arm Tree-Like Multi-Cluster Tools

Scheduling Single-Arm Multi-Cluster Tools with Lower Bound Cycle Time via Petri Nets

Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets

Scheduling of Single-Arm Multi-cluster Tools with Wafer Residency Time Constraints in Semiconductor Manufacturing

Scheduling Of Single-Arm Multi-Cluster Tools To Achieve The Minimum Cycle Time

Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools

Optimally Scheduling Single-Arm Multicluster Tools for Manufacturing Hybrid-Type Wafers

Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types

Scheduling and Optimization of Mixed-Processing with Multi-Variety Wafers in Dual-Armed Cluster Tools

Scheduling Single-Arm Multicluster Tools for Two-Type Wafers with Lower-Bound Cycle Time

Cyclic scheduling of cluster tools with equipment front-end module and multifunctional load locks

Scheduling Dual-Arm Multi-Cluster Tools With Regulation of Post-Processing Time

Close-down process scheduling of wafer residence time-constrained multi-cluster tools

Real-Time Scheduling and Control of Single-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation by Using Resource-Oriented Petri Nets

Scheduling Transient Processes for Time-Constrained Single-Arm Robotic Multi-Cluster Tools

Post-processing Time-Aware Optimal Scheduling of Single Robotic Cluster Tools

Periodic Scheduling Optimization for Dual-Arm Cluster Tools with Arm Task and Residency Time Constraints via Petri Net Model

Schedulability Analysis for Dual-Armed Cluster Tools with Mixed-Processing of Multi-Variety Wafers

Scheduling a Single-Arm Two-Cluster Tool with a Process Module Failure Subject to Wafer Residency Time Constraints

Scheduling and Control of Startup Process for Single-Arm Cluster Tools with Residency Time Constraints