The Out-of-plane Thermal Conductivity of Si/Ge Superlattice Based On the Serious Model

冯媛,梁新刚,鞠生宏
2013-01-01
Kung Cheng Je Wu Li Hsueh Pao/Journal of Engineering Thermophysics
Abstract:The superlattice semiconductor materials are widely used in thermal, optical, microelectronic devices. Therefore it is necessary to study its thermal conductivity and heat transfer properties. A serious model of thermal resistance was used to calculate the thermal conductivity of Si/Ge superlattice that considers the effect of interfaces and phonon transmission variation with wavelength. The change of thickness ratio of Si and Ge films will not affect the thermal conductivity of the superlattices for fixed period. With increasing temperature, the thermal conductivity approaches to a constant value, the role of interface scattering of phonon propagation decreases, and the U progress is getting more and more important.
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