Influence of Arched Groove Bottom on Laser-Induced Damage of Multilayer Dielectric Gratings

Fanyu Kong,Yunxia Jin,Shijie Liu,Heyuan Guan,Ying Du,Hongbo He
DOI: https://doi.org/10.1016/j.ijleo.2013.05.064
IF: 3.1
2013-01-01
Optik
Abstract:Scanning electron microscopy (SEM) was used to characterize the nanosecond laser-induced damages occurring in multilayer dielectric gratings (MDG). The initial damages of MDG locate at grating ridges while the damages with micro-holes and cracks appear in the groove bottom. Compared with the melted-hole damages of grating ridges, the groove bottom crack damages indicate they are the major promoting role of causing the catastrophic damage for MDG. The damage mechanism and development were discussed combined with the grating structure and the normalized electric field intensity (NEFI). The profile of groove bottom of MDG was explored by atomic force microscope (AFM) in detail. It is found that the bottom shape is arched with the maximum height of 30 nm. Based on these measuring grating parameters, NEFI of MDG was numerically calculated with finite difference time-domain (FDTD) algorithm to explain the damage phenomenon. The arched bottom makes an enhancement of NEFI maximum in groove bottom, thereby increasing the risk of catastrophic damage for MDG. According to simulated results, flattening groove bottom and/or deeper etching within tolerance allowance range can reduce NEFI maximum and gradient in groove bottom effectively.
What problem does this paper attempt to address?