Measurement Error Analysis for Machine Tool Roll Error Measurement Due to Inclined Half Wave Plate

ZHONG Lihong,WANG Zhao,TANG Shanzhi,GAO Jianmin,GUO Junjie
DOI: https://doi.org/10.7652/xjtuxb201305018
2013-01-01
Abstract:To evaluate the influence of motion error of machine tool,such as pitch and yaw,on the roll error measurement,a mathematical model was established,then the conversion process of the lasers through the measurement system was calculated by Jones matrix method and measurement formula between the phase and the roll error was ultimately derived.The measurement error caused by angular motion error of the sensitive component,ie the half wave plate,was analyzed theoretically following polarization and crystal optics theory.Results show that the measurement error gets less than 0.1% which illustrates the feasibility of the method for roll error measurement by orthogonally polarized lasers.
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