Mechanism of Optical Absorption Enhancement of Surface Textured Black Silicon

Jing Jiang,Shibin Li,Yadong Jiang,Zhiming Wu,Zhanfei Xiao,Yuanjie Su
DOI: https://doi.org/10.1007/s10854-012-0756-z
2012-01-01
Journal of Materials Science Materials in Electronics
Abstract:Micro-pyramids and nano-pores structures on the silicon surface are fabricated. The reflectance of both textured samples is drastically suppressed compared with that of the non-textured sample for wavelengths from 250 to 1,100 nm. The reflectance rises from 1,000 nm for non-textured sample. However, 30 nm red-shift is observed for both textured samples. The absorptance of both textured samples is obviously enhanced in the ultraviolet–visible wavelengths for the reduction of reflectance. Without introducing any adulterant into samples, both textured samples exhibit strong absorptance in the infrared wavelengths where the non-textured sample becomes optically transparent. The absorptance of both textured samples is 70 % at wavelengths of 1.1 μm, and the absorptance of 30 % for micro-pyramids structure sample and 10 % for nano-pores structure sample are observed at wavelengths longer than 1.1 μm. Furthermore, 110 and 60 nm red-shift in bandgap wavelengths exist in micro-pyramids structure sample and nano-pores structure sample compared with non-textured sample.
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