Simulation and Optimization of Capacitance Sensor Based on Orthogonal Test

WANG Xiaoxin,YAN Jiebing,HU Hongli,GAO Xiangxiang,ZHANG Xiao
DOI: https://doi.org/10.7652/xjtuxb201302014
2013-01-01
Abstract:Focusing on the poor sensing field sensitivity uniformity and low measuring sensitivity of the capacitance sensor,an approach combining finite element analysis with orthogonal experiment is proposed.In this work,2-electrode,4-electrode and 8-electrode capacitance sensors are optimally designed,and variance analysis is carried out for the test results.The optimum combination schemes,which satisfy the sensing field sensitivity uniformity and measuring sensitivity simultaneously,are obtained by comparing and analyzing the effects of various parameters on different capacitance sensors.The simulations show that with increasing electrode number,the sensitivity distribution of detection field gets more uneven,and the sensitivity of capacitance sensor gets higher,a static test experiment is conducted on these optimized results.With increasing electrode number,the variance of these three kinds of electrode sensor respectively reaches to 0.054 9,0.061 3 and 0.096 3,the experimental results well coincide with the simulations.
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