Statistical Approach to the Reset Switching of the Hfo2-Based Solid Electrolyte Memory

Xiaoyi Yang,Shibing Long,Kangwei Zhang,Xiaojuan Lian,Xiaoyu Liu,Qi Liu,Hangbing Lv,Lordi Sune,Ming Liu
DOI: https://doi.org/10.1109/ulis.2013.6523505
2013-01-01
Abstract:The RESET switching of an oxide-based bipolar solid electrolyte memory with the Cu/HfO 2 /Pt structure is studied in this work. The parameters of the RESET point defined at the maximum of the RESET current evolution, RESET voltage (V RESET ) and RESET current (I RESET ), are analyzed with a statistical method. The experimental raw data show a U-shape relation between VRESET and the ON-state resistance (R ON ). After data correction by a series resistance (R S ), V RESET is roughly constant and the RESET current (IRESET) is inversely proportional to R ON . These behaviors are in agreement with the thermal dissolution model of RESET. The further statistical analyses in terms of Weibull distributions show that the R ON distribution has a strong influence on the I RESET and V RESET distributions. By using a “resistance screening” method, the I RESET and V RESET distributions are found to be compatible with a Weibull model. The Weibull slopes of the I RESET and V RESET are independent on R ON , indicating that the RESET point corresponds to the initial phase of CF dissolution, according to our cell-based RESET model for the unipolar VCM (valence change mechanism) device. On the other hand, the scale factor of the V RESET distribution (V RESET63% ) is roughly constant, while the scale factor of the I RESET (I RESET63% ) is inversely proportional to R ON , which is consistent with the thermal dissolution model of RESET and our cell-based RESET model. The RESET switching of the studied oxide-based bipolar solid electrolyte memory is dominated by the thermal dissolution mechanism.
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