Single-Walled Carbon Nanotube Pirani Gauges Prepared by DEP Assembly

Fangzhou Yu,Jinwen Zhang
DOI: https://doi.org/10.1109/TNANO.2013.2247623
2013-01-01
IEEE Transactions on Nanotechnology
Abstract:This paper reports the design, fabrication, and characteristics of the single-walled carbon nanotubes (SWNTs) Pirani gauge fabricated by dielectrophoretic assembly first which requires simple equipments and process, costs little, and operates at room temperature without limitation on the materials of electrode and substrate. Its theory and design were described in detail. The characteristics were ...
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