Abstract:The scalable growth of wafer-sized single-crystal graphene in an energy-efficient manner and compatible with wafer process is critical for the killer applications of graphene in high-performance electronics and optoelectronics. Here, ultrafast epitaxial growth of single-crystal graphene wafers is realized on single-crystal Cu90Ni10(1 1 1) thin films fabricated by a tailored two-step magnetron sputtering and recrystallization process. The minor nickel (Ni) content greatly enhances the catalytic activity of Cu, rendering the growth of a 4 in. single-crystal monolayer graphene wafer in 10 min on Cu90Ni10(1 1 1), 50 folds faster than graphene growth on Cu(1 1 1). Through the carbon isotope labeling experiments, graphene growth on Cu90Ni10(1 1 1) is proved to be exclusively surface-reaction dominated, which is ascribed to the Cu surface enrichment in the CuNi alloy, as indicated by element in-depth profile. One of the best benefits of our protocol is the compatibility with wafer process and excellent scalability. A pilot-scale chemical vapor deposition (CVD) system is designed and built for the mass production of single-crystal graphene wafers, with productivity of 25 pieces in one process cycle. Furthermore, we demonstrate the application of single-crystal graphene in electrically controlled liquid-crystal microlens arrays (LCMLA), which exhibit highly tunable focal lengths near 2 mm under small driving voltages. By integration of the graphene based LCMLA and a CMOS sensor, a prototype camera is proposed that is available for simultaneous light-field and light intensity imaging. The single-crystal graphene wafers could hold great promising for high-performance electronics and optoelectronics that are compatible with wafer process.

Catalyst-free growth of nanocrystalline graphene/graphite patterns from photoresist.

Confined Growth of Carbon Nanotubes in Nanocutting Channel on Highly Oriented Pyrolytic Graphite

Thickness-controlled Direct Growth of Nanographene and Nanographite Film on Non-Catalytic Substrates

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Surface Engineering of Copper Foils for Growing Centimeter-Sized Single-Crystalline Graphene.

Triggering the Continuous Growth of Graphene toward Millimeter Size Grain

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Catalyst-free Growth of Single- to Few-Layered Graphene and Carbon Nanotubes on an Ionic Liquid Surface

Controlled Growth, Patterning and Placement of Carbon Nanotube Thin Films

Metal-Catalyzed Crystallization of Amorphous Carbon to Graphene

Ultrafast Growth of Nanocrystalline Graphene Films by Quenching and Grain-Size-dependent Strength and Bandgap Opening

Ultrafast Catalyst-Free Graphene Growth on Glass Assisted by Local Fluorine Supply

Direct synthesis of nanopatterned epitaxial graphene on silicon carbide

Gas-phase synthesis of carbon nanotube-graphene heterostructures

Scalable and ultrafast epitaxial growth of single-crystal graphene wafers for electrically tunable liquid-crystal microlens arrays

Uniform Single-Layer Graphene Growth on Recyclable Tungsten Foils

Fabrication of Graphite Nano-Structures

Electrostatic Force Assisted Exfoliation of Prepatterned Few-Layer Graphenes into Device Sites.

Direct Formation of Wafer-Scale Single-Layer Graphene Films on the Rough Surface Substrate by PECVD