Silicon carbide capacitive pressure sensors with arrayed sensing membranes

Bo Meng,Wei Tang,Xuhua Peng,Haixia Zhang
DOI: https://doi.org/10.1109/NEMS.2013.6559868
2013-01-01
Abstract:Silicon carbide absolute capacitive pressure sensors with arrayed sensing membranes was designed and fabricated based on silicon-glass anodic bonding. The sensing membranes consist of multiple layers of SiC/Au/SiC, making the device promising to be applied in corrosive environment. The fabricated sensor was integrated with a capacitor read-out circuit in a size of 22 × 23 × 9 mm3, and then packaged by PDMS, which serves as the coating layer of the electrodes. The packaged sensor remained nearly the same linear response after 60-minutes 30% KOH etching as the one before PDMS packaging, i.e. the sensor with a 5×5 array of 100×100 μm2 square sensing membranes demonstrates a sensitivity of 0.021 pF/bar over a pressure range from 0.5 bar to 5 bar, and then modified to 0.023pF/bar after KOH etching.
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