W-Sb-Te Phase-Change Material: A Candidate For The Trade-Off Between Programming Speed And Data Retention

Cheng Peng,Liangcai Wu,Feng Rao,Zhitang Song,Pingxiong Yang,Hongjia Song,Kun Ren,Xilin Zhou,Min Zhu,Bo Liu,Junhao Chu
DOI: https://doi.org/10.1063/1.4754138
IF: 4
2012-01-01
Applied Physics Letters
Abstract:W-Sb-Te phase-change material has been proposed to improve the performance of phase-change memory (PCM). Crystallization temperature, crystalline resistance, and 10-year data retention of Sb2Te increase markedly by W doping. The W-x(Sb2Te)(1-x) films crystallize quickly into a stable hexagonal phase with W uniformly distributing in the crystal lattice, which ensures faster SET speed and better operation stability for the application in practical device. PCM device based on W-0.07(Sb2Te)(0.93) shows ultrafast SET operation (6 ns) and good endurance (1.8 x 10(5) cycles). W-Sb-Te material is a promising candidate for the trade-off between programming speed and data retention. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4754138]
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