Replicable One-Dimensional Non-Polarizing Guided Mode Resonance Gratings under Normal Incidence

Muhammad Rizwan Saleem,Dandan Zheng,Benfeng Bai,Petri Stenberg,Markku Kuittinen,Seppo Honkanen,Jari Turunen
DOI: https://doi.org/10.1364/oe.20.016974
IF: 3.8
2012-01-01
Optics Express
Abstract:Polarization-insensitive guided-mode resonance (GMR) filters have significant role in applications such as optical communication systems. Here, we report the design and fabrication of two types of simple-structured one-dimensional (1D) GMR gratings with non-polarizing resonance properties under normal incidence. A single-layer rectangular-profile TiO2 grating is fabricated by electron beam lithography and reactive ion etching, which demonstrates, for the first time in experiment, almost perfect non-polarizing filtering effect with 1D grating under normal incidence. Then, a TiO2-coated polycarbonate 1D GMR grating is fabricated by nanoimprinting and atomic layer deposition, which also exhibits good non-polarizing property and the potential of low-cost mass replication of such functional devices. (C) 2012 Optical Society of America
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