Electrical Properties of Lead Zirconate Titanate Thick Film Containing Micro- and Nano-Crystalline Particles

Lu Ran,Jiang Gen-Shan,Li Bin,Zhao Quan-Liang,Zhang De-Qing,Yuan Jie,Cao Mao-Sheng
DOI: https://doi.org/10.1088/0256-307x/29/5/058101
2012-01-01
Chinese Physics Letters
Abstract:We report the ferroelectric, dielectric and piezoelectric properties of a dense and crack-free lead zirconate titanate (Pb(Zr0.52Ti0.48)O-3, PZT) thick film containing micro- and nano-crystalline particles. The results show that these electrical properties are dependent strongly on the annealing temperature and film thickness. For the different-annealing-temperature and different-thickness films, the higher-annealing-temperature thicker ones show the larger remnant polarization and smaller coercive field. The dielectric results show that relative dielectric constant achieves the largest value at annealing temperature of 700 degrees C, and increases with the increasing film thickness. For the piezoelectric properties, the longitudinal piezoelectric coefficient increases linearly with the film thickness increasing and the 4-mu m-thick PZT film shows the largest value of about 200.65 pC/N. Therefore, the PZT thick films present good electric properties and enlarged potential in MEMS applications.
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