Fabry-Perot Interferometric Fiber-optic Ultrasonic Hydrophone Based on Parylene Film

ZHANG Jie,ZHAO Chunliang,ZENG Deping,JIA Pinggang,WANG Shuaijie,MA Ziguo,WANG Daihua
DOI: https://doi.org/10.3969/j.issn.1004-2474.2012.03.009
2012-01-01
Abstract:A Fabry-Perot interferometric fiber-optic hydrophone formed by Parylene coating for measuring high intensity focused ultrasound(HIFU) is presented.The Fabry-Perot cavity of the fiber-optic hydrophone is formed by coating a Parylene film on the cleaved end of a single mode fiber by the vacuum vapor deposition method.The sensing principle and the demodulation principle of the Fabry-Perot interferometric fiber-optic hydrophone has been discussed.An experiment system of HIFU acoustic field has been fabricated.The experimental results show that the proposed Fabry-Perot interferometric fiber-optic hydrophone can accurately sense the ultrasonic signals,the non-linearity of the output voltage of the fiber-optic hydrophone relative to the voltage applied to the ultrasonic transducer is less than 0.01,and the results sensed by the developed Fabry-Perot interferometric fiber-optic hydrophone agree with those sensed by the PVDF needle hydrophone.
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