Fabrication of micro-structures on a PVDF/TiO 2 nano-composite film using photocatalytic lithography

Ningli An,Hongzhong Liu,Yucheng Ding,Bingheng Lu,Min Zhang
DOI: https://doi.org/10.1016/j.apsusc.2012.01.103
IF: 6.7
2012-01-01
Applied Surface Science
Abstract:In the present study, a poly(vinylidene fluoride) (PVDF)/TiO2 nano-composite film was prepared by coating a substrate with an acetone/DMF solution, which was then evaporated at a temperature of 110°C. Micro-structure patterns were fabricated on a PVDF/TiO2 nano-composite film with photocatalytic lithography. The morphological and chemical compositions of the micro-structure were investigated by optical microscope, SEM and XPS. Experimental results show that the micro-structure patterns can be directly replicated on the PVDF/TiO2 nano-composite film with photocatalytic lithography. The micro-structure is approximately 4μm in depth which is obtained during the water phase of the process with UV-LED irradiation in 5h. The results indicate that the fabrication methodology can be potentially applied towards the large-scale fabrication of actuators and sensor devices.
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