Abstract:Characterization of the three-dimensional (3D) structure in directed self-assembly (DSA) of block copolymers is crucial for understanding the complex relationships between the guiding template and the resulting polymer structure so DSA could be successfully implemented for advanced lithography applications. Here, we combined scanning transmission electron microscopy (STEM) tomography and coarse-grain simulations to probe the 3D structure of P2VP-b-PS-b-P2VP assembled on prepatterned templates using solvent vapor annealing. The templates consisted of nonpreferential background and raised guiding stripes that had PS-preferential top surfaces and P2VP-preferential sidewalls. The full 3D characterization allowed us to quantify the shape of the polymer domains and the interface between domains as a function of depth in the film and template geometry and offered important insights that were not accessible with 2D metrology. Sidewall guiding was advantageous in promoting the alignment and lowering the roughness of the P2VP domains over the sidewalls, but incommensurate confinement from the increased topography could cause roughness and intermittent dislocations in domains over the background region at the bottom of the film. The 3D characterization of bridge structures between domains over the background and breaks within domains on guiding lines sheds light on possible origins of common DSA defects. The positional fluctuations of the PS/P2VP interface between domains showed a depth-dependent behavior, with high levels of fluctuations near both the free surface of the film and the substrate and lower fluctuation levels in the middle of the film. This research demonstrates how 3D characterization offers a better understanding of DSA processes, leading to better design and fabrication of directing templates.

Influence of template geometry on polymer micro-structure duplication in electrohydrodynamics patterning process

Numerical Study of the Faithful Replication of Micro/nanostructures on Curved Surfaces by the Electrohydrodynamic Instability Process.

Study on Polymer Flow Profile in Micro Hot Embossing

Optimization of Control Parameters in Micro Hot Embossing

Simulation Research on Stress of Polymeric Patterns During Micro Hot Embossing

Flow Behavior of Polymer During Micro Hot Embossing

Experimental Study on the Hot Embossing Polymer Microfluidic Chip

Research on Optimization of the Hot Embossing Process

Numerical Model of Jet Formation During Melt Electrowriting for Fabrication of Precise Structures

Pattern Formation in a Confined Polymer Film Induced by a Temperature Gradient

Digitally Programmable Microphase Separation in Polymer Network Generates Microstructure Pattern

Two-photon polymerized wetting morphologies for tunable external and internal electrode micropatterning

Electrically Induced Nanostructuring over Large Area--a New Idea from Concept to Practice

Patterning High-Resolution Microstructures on Thermoplastics by Ceramic Nanoparticles Filled Epoxy Coated Molds for Duplicating Nature-Derived Functional Surfaces

Constructing and Tuning Polymer Surface Microstructures

Patterning Flat-Sheet Poly(vinylidene Fluoride) Membrane Using Templated Thermally Induced Phase Separation

Micropattern Fabricated by Acropetal Migration Controlled through Sequential Photo and Thermal Polymerization

Surface patterning using templates: concept, properties and device applications

Quantitative Three-Dimensional Characterization of Block Copolymer Directed Self-Assembly on Combined Chemical and Topographical Prepatterned Templates.

Engineering Surface Patterns with Shape Memory Polymers: Multiple Design Dimensions for Diverse and Hierarchical Structures

Non-ultraviolet-based patterning of polymer structures by optically induced electrohydrodynamic instability