Electrically Induced Nanostructuring over Large Area--a New Idea from Concept to Practice

Qing Li,Xiangming,Yi Ding,Yucheng,Yikai Shao,Jinyou,Ming Liu,Hongzhong
2013-01-01
Abstract:The paper proposes a novel nano-patterning method called electrically induced nanostructuring,where an external electric field,insteadof the external mechanical pressure,is applied to generate an electrohydrodynamic force acting on the polymer-air interface to drive the polymer’s flow into the mold cavities. This electrically induced nanostructuring method no longer requires a large mechanical pressure externally applied for actuating the polymer filling in the mold cavities,and has been used to successfully fabricate micro/nano pillar arrays of a high aspect ratio (up to 10),which have been usually considered to bedifficult to fabricateby conventional molding or nanoimprinting processes.
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