Ordered SrTiO 3 Nanoripples Induced by Focused Ion Beam

Jiang Wu,Gang Chen,Zhaoquan Zeng,Shibin Li,Xingliang Xu,Zhiming M. Wang,Gregory J. Salamo
DOI: https://doi.org/10.1007/BF03353721
IF: 26.6
2012-01-01
Nano-Micro Letters
Abstract:Ordered nanoripples on the niobium-doped SrTiO 3 surfaces were fabricated through focused ion beam bombardment. The surface morphology of the SrTiO 3 nanoripples was characterized using in situ focused ion beam/scanning electron microscopy. The well-aligned SrTiO 3 nanostructures were obtained under optimized ion irradiation conditions. The characteristic wavelength was measured as about 210 nm for different ion beam currents. The relationship between the ion irradiation time and current and SrTiO 3 surface morphology was analyzed. The presented method will be an effective supplement for fabrication of SrTiO 3 nanostructures that can be used for ferroelectric and electronic applications.
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