Improvement of Light Extraction Efficiency of GaN-based Flip-Chip Light-Emitting Diodes by Patterning the Double Sides of Sapphire

Xiaoqing Du,Hong Chen,Guangming Zhong,Xiangkun Dong,Weimin Chen,Xiaohua Lei,Xianming Liu
DOI: https://doi.org/10.1117/12.999694
2012-01-01
Abstract:The double-side patterned sapphire structure was proposed to improve the light extraction efficiency (LEE) of flip-chip GaN-based light-emitting diodes (LEDs). The influences of sapphire substrate thickness, pattern shapes and sizes on LEE were analyzed by Monte Carlo simulation method. Using silicon oxide as mask membrane, double-side patterned sapphires were processed by the standard lithography and the reaction-ion-etching (RIE) technology. The LEDs with patterned sapphire were packaged. The measured light outputs of LEDs verified our predicted effects.
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