Abstract:Positioning stages using piezoelectric stack actua- tor (PEA) have very high theoretical bandwidth and resolution. However, as the total length of travel increases, nonlinear dynamics due to inherent hysteresis starts to dominate. In this paper, we separate the fast and slow dynamics of the total displacement and propose a simple first-order model. By approximating the hysteresis mapping with simple functions, it is linearly parameterized for subsequent adaptive robust controller design. Experimental results from tracking control of sinusoidal and point-to-point trajectories show tracking error on the magnitude of the sensor noise level and demonstrate the effectiveness of the approach. Index Terms— Piezoelectric Actuators, Motion Control, Adaptive Control, Robust Control, Precision Manufacturing. I. INTRODUCTION hysteresis with simple functions, we obtain a simple first order model linearly parameterized by 4 parameters, which can be adapted online for model compensation. The adaptive robust control (ARC) scheme (4) is applied to the model, which adapts the unknown parameters using a discontinuous projection based method, and the uncompensated unknown nonlinearities are attenuated by certain robust control laws. As a result, the time consuming identification of the exact hysteresis dynamics is avoided without sacrificing tracking performance.

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