Abstract:Surface plasmon polaritons (SPPs), which are coupled excitations of electrons bound to a metal-dielectric interface, show great potential for application in future nanoscale photonic systems due to the strong field confinement at the nanoscale, intensive local field enhancement, and interplay between strongly localized and propagating SPPs. The fabrication of sufficiently smooth metal surface with nanoscale feature size is crucial for SPPs to have practical applications. A template stripping (ST) method combined with PMMA as a template was successfully developed to create extraordinarily smooth metal nanostructures with a desirable feature size and morphology for plasmonics and metamaterials. The advantages of this method, including the high resolution, precipitous top-to bottom profile with a high aspect ratio, and three-dimensional characteristics, make it very suitable for the fabrication of plasmonic structures. By using this ST method, boxing ring-shaped nanocavities have been fabricated and the confined modes of surface plasmon polaritons in these nanocavities have been investigated and imaged by using cathodoluminescence (CL) spectroscopy, which has been turned out to be a powerful means to characterize the resonant SPPs modes confined in metal nanocavities [1~5]. The mode of the out-of-plane field components of surface plasmon polaritons dominates the experimental mode patterns, indicating that the electron beam locally excites the out-of-plane field component of surface plasmon polaritons. Quality factors can be directly acquired from the spectra induced by the ultrasmooth surface of the cavity and the high reflectivity of the silver (Ag) reflectors. Because of its three-dimensional confined characteristics and the omnidirectional reflectors, the nanocavity exhibits a small modal volume, small total volume, rich resonant modes, and flexibility in mode control. Numerous applications, such as plasmonic filter, nanolaser, and efficient light-emitting devices, can be expected to arise from these developments.

Ultra-deep subwavelength periodic patterning through multilayered metamaterial microcavity

Subwavelength Device Based on Surface Plasmon Polariton

A Direct Near-Field Observation of Conversion Between Waveguide Modes and Leaky Modes in Periodic Metal Structures

Patterned Microstructure Array Fabrication By Using A Novel Standing Surface Acoustic Wave Device

Ultra Sub-Wavelength Gigahertz Resonator for Constructing Silicon-Substrate Metamaterials

Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces

Microcavity electrodynamics of hybrid surface plasmon polariton modes in high-quality multilayer trench gratings

Single-mode and Wavelength Tunable Lasers Based on Deep-Submicron Slots Fabricated by Standard UV-lithography

Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography

Plasmonic Interference Lithography by Coupling the Bulk Plasmon Polariton Mode and the Waveguide Mode

Design of High-Q-Gradient Dielectric Nanoparticle Chain Surface Plasmonic Cavities

Self‐Aligned Laser‐Induced Periodic Surface Structures for Large‐Area Controllable Nanopatterning

Sub-diffraction-limited Interference Photolithography with Metamaterials

A submicron broadband surface-plasmon-polariton unidirectional coupler

Controllable Patterning of Metallic Photonic Crystals for Waveguide–Plasmon Interaction

Ultrafine and Smooth Full Metal Nanostructures for Plasmonics

Plasmonic Lithography Utilizing Epsilon Near Zero Hyperbolic Metamaterial

“Seeing” the Resonant SPP Modes Confined in Metal Nanocavity Via Cathodoluminescne Spectroscopy

Laser Patterning for 2D Lateral and Vertical VS2/MoS2 Metal/Semiconducting Heterostructures

Negative index metamaterial at ultraviolet range for subwavelength photolithography

Subwavelength Photorefractive Grating in a Thin-Film Lithium Niobate Microcavity