Fabrication of High-Q Polymer Microring Resonators

Jie Teng,Junbo Feng,Jin Guo,Mingshan Zhao
DOI: https://doi.org/10.3788/col201210.s21304
IF: 2.56
2012-01-01
Chinese Optics Letters
Abstract:A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining waveguides. The PSQ-L polymer film shows good optical properties and high thermal stability. The all polymer microring resonator is fabricated by conventional lithography and ICP etching process. About 3-dB extinction ratio from the through port and 23-dB extinction ratio from the drop port are obtained. A high Q value of 5.7×104 is obtained. The optical loss of the bending waveguides is estimated to be 1.6 dB/cm. The high Q polymer ring resonators show potential in sensing applications.
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