Study on flow behavior of BCB in adhesive bonding aiming at reducing transverse deformation

Kangfa Deng,Huan Zheng,Shaobo Jiang,Wei Zhang
DOI: https://doi.org/10.1109/ICSENS.2012.6411153
2012-01-01
Abstract:This paper presents a novel method to investigate the flow behavior of Benzocyclobutene (BCB) in adhesive bonding process, both the comparison experiment and theory analysis were presented. Since the BCB layer was spun over topography, the surface nonuniformity must be considered. In order to investigate serious transverse deformation which may cause the low yield of bonding process, the elastomechanics theory was used to explain the flow behavior of BCB by treating it as elastic solid material, and the theory was in accord with the experiment result. Based on these theoretical and experimental studies, an improved process was successfully demonstrated by changing the sequence of BCB bonding process. As a result, transverse deformation was reduced and the shape of the BCB structures was retained very well throughout the bonding process.
What problem does this paper attempt to address?