Effect of the ferroelectric inversion layer on resonance modes of LiNbO3 thickness-shear mode resonators

Tingfeng Ma,Ji Wang,Jianke Du,Lili Yuan,Zhitian Zhang,Chao Zhang
DOI: https://doi.org/10.1143/APEX.5.116501
IF: 2.819
2012-01-01
Applied Physics Express
Abstract:The effect of the ferroelectric inversion layer on resonance modes of LiNbO3 thickness-shear mode resonators was investigated. It is found that with the ferroelectric inversion layer, the spurious modes of the LiNbO3 resonators can be suppressed significantly. Moreover, mechanisms of the effect are discussed. This discovery is important to investigate high-sensitivity bulk acoustic wave sensors using LiNbO3 thickness-shear mode resonators. (C) 2012 The Japan Society of Applied Physics
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