Properties of Sn-doped barium zirconate titanate films

Xiao-ling DENG,Wei CAI,Chun-lin FU,Gang CHEN,Dong-jiao GUO
2012-01-01
Abstract:The Sn-doped (BaZr 0.2Ti 0.8)O 3 (BZT) films were prepared by sol-gel processing on Pt/Ti/SiO 2/Si substrates. The results showed that the films belonged to the perovskite phase. There was a second phase (BaO) when the Sn-doped content was more than 4%. SEM showed that the surface morphology of BZT films was smooth and there was a few holes and cracks. The BZT films had the highest dielectric constant and lower loss when the Sn-doped content increased to 8%. The addition of the remanent polarization was 2.29μC/cm 2 and the coercive field was 10.36 kV/cm.
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