Abstract:A highly sensitive terahertz (THz) waveguided-mode resonant biochemical sensing structure has been designed and simulated. The structure consists of a silicon prism, a dielectric film and a nanoporous gold film, which acts as both a THz waveguide layer and a biochemical molecule enrichment layer to enhance the interaction between the THz waveguide mode and the biochemical molecules, thus improving the detection sensitivity. When the THz waveguide mode is excited by the prismatic total reflection method, the absorption of the nanoporous gold film makes the THz reflection spectrum appear sharp resonance absorption peaks, which can determine the resonance frequency of the THz waveguide mode and the sensitivity to the refractive index of the analyte and the enrichment of biochemical molecules. The simulation results indicate that the above THz mode resonance structure has high refractive index sensitivity for substances to be measured in the refractive index range 1-2.3, and that the coupling efficiency and Figure of Merit (FOM) of the structure can be significantly improved by optimising the thickness and refractive index of the dielectric film. In the case of nanoporous gold membranes filled with nitrogen, the refractive index sensitivity can be as high as 13.42 THz/RIU, and the FOM as high as 167.70 RIU-1. In addition, the enrichment of small molecules by the nanoporous gold membrane allows both the TE and TM modes in this structure to detect small biochemical molecules at low concentrations, giving a significant advantage over similar sensors in terms of sensitivity and lower detection limit, showing good potential for application.

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