High-Field Asymmetric Waveform Ion Mobility Spectrometry Based on MEMS

Chen Chilai,Zhao Cong,Wang Dianling,Cheng Yupeng,Kong Deyi,Wang Huanqin,Gao Jun,Gao Lisheng,Lin Xinhua,Wang Yingxian,Yin Shiping,Zhang Rui
DOI: https://doi.org/10.3969/j.issn.1671-4776.2011.02.009
2011-01-01
Abstract:The development history and shortcomings of ion mobility spectrometry(IMS)are reviewed briefly.Then,as a novel gas ion separation MEMS technology,the high-field asymmetric waveform ion mobility spectrometry(FAIMS)based on the nonlinear characteristics of ions mobility under a high-field was discussed.The acetone,benzene,TNT,paraxylene and Benzoepin were separated and detected by self-prepared FAIMS apparatus made by MEMS manufacturing technology.The results demonstrate that the five samples can be separated and detected with high efficiency,resolution and sensitivity by FAIMS.The linear regression curve of the detection current with the benzene concentration shows that the measure accuracy is 10-9 order with the linearity of 0.95.Besides that,it indicates a great promising application prospect in ion separation and detection,environment and food safety,biological macromolecules and other fields,and will promote the development of the next generation ion separation and detection technology.
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