Abstract:In this paper, an orthogonal type two-axis Lloyd's mirror interference lithography technique was employed to fabricate two-dimensional planar scale gratings for surface encoder application. The two-axis Lloyd's mirror interferometer is composed of a substrate and two reflective mirrors (X- and Y-mirrors), which are placed edge by edge perpendicularly. An expanded and collimated beam was divided into three beams by this interferometer, a direct beam and two reflected beams, projected onto the substrate, X- and Y-mirrors, respectively. The unexpected beam sections having twice reflected off the mirrors were blocked by a filter. The remaining two reflected beams interfered with the direct beam on the substrate, generating perpendicularly cross patterns thus forming two-dimensional scale gratings. However, the two reflected beams undesirably interfere with each other and generate a grating pattern along 45-degree direction against the two orthogonal direction, which influence the pattern uniformity. Though an undesired grating pattern can be eliminated by polarization modulation with introduction of waveplates, spatial configuration of waveplates inevitably downsized the eventual grating, which is a key parameter for grating interferometry application. For solving this problem, theoretical and experimental study was carefully carried out to evaluate the fabrication quality with and without polarization modulation. Two-dimensional scale gratings with a 1 m period in X- and Y-directions were achieved by using the constructed experiment system with a 442 nm He-Cd laser source. Atomic force microscopy (AFM) images and the result of diffraction performances demonstrated that the orthogonal type two-axis Lloyd's mirror interferometer can stand a small order undesired interference, that is, a degree of orthogonality between two reflected beams, denoted by , no larger than a nominal value of 0.1.

Method of Making Mosaic Gratings by Using a Two-Color Heterodyne Interferometer Containing a Reference Grating.

Method to Mosaic Gratings That Relies on Analysis of Far-Field Intensity Patterns in Two Wavelengths

Design of Large-Deflection-angle High-Diffraction-efficiency High-Dispersion Hybrid Gratings

Optical Mosaic Gratings Made by Consecutive, Phase-Interlocked, Holographic Exposures Using Diffraction from Latent Fringes

Fabrication Of Optical Mosaic Gratings With Phase And Attitude Adjustments Employing Latent Fringes And A Red-Wavelength Dual-Beam Interferometer

Optical Mosaic Method for Orthogonally Crossed Gratings by Utilizing Information about Both Main Periodic Directions Simultaneously

Analysis of a Lloyd's Mirror Interferometer for Fabrication of Gratings

Two-dimensional Surface Profile Imaging Technique Based on a Double-Grating Frequency Shifter

Fabrication of Optical Mosaic Gratings by Consecutive Holographic Exposures Employing A Latent-Fringe Based Alignment Technique

Design and Testing of a Compact Non-Orthogonal Two-Axis Lloyd's Mirror Interferometer for Fabrication of Large-Area Two-Dimensional Scale Gratings

Fabrication of a Two-Dimensional Diffraction Grating by a Two-Axis Lloyd's Mirror Interferometer

Double-grating frequency shifter for low-coherence heterodyne interferometry

Influences of Misalignment Errors of Optical Components in an Orthogonal Two-Axis Lloyd's Mirror Interferometer.

Fabrication of Optical Mosaic Gratings: a Self-Referencing Alignment Method

A Mechanical Mosaic Method for Two-Dimensional Planar Grating Based on Diffracted Beams Orientation

Removal of All Mosaic Grating Errors in a Single-Interferometer System by a Phase-Difference Reference Window.

A Two-Color Heterodyne Interferometer Based on Diffraction Grating for Displacement Measurement

Direct Design Method for Holographic Grating Imaging Spectrometer and Corresponding Recording System

A mechanical mosaic method for reflective grating base on diffracted beams orientation

Positional Detection in Grating Mosaic Based on Image Processing of Far-Field Diffraction Intensity Patterns in Two Wavelengths

An Orthogonal Type Two-Axis Lloyd'S Mirror For Holographic Fabrication Of Two-Dimensional Planar Scale Gratings With Large Area