Hydrothermal Synthesis of Ordered Mesoporous Silicas with Extraordinarily Ultra-low Dielectric Constants

LIU Fu-Jian,HAN Bing,CAO Yang,ZOU Yong-Cun,MENG Xiang-Ju,XIAO Feng-Shou
DOI: https://doi.org/10.3969/j.issn.0251-0790.2012.09.006
2012-01-01
Abstract:Ordered mesoporous silica samples with extraordinarily ultra-low dielectric constants(k) were hydrothermally synthesized at different temperatures (150-200 degrees C) via soft-templates including amphiphilic triblock polymers of P123(PEO20-PPO70-PEO20) and F127 (PEO106-PPO70-PEO106). The characterizations of XRD and N-2 adsorption-desorption isotherms show that these samples have ordered mesostructure, high BET surface area, large pore volume and uniform pore size. Si-29 MAS NMR spectra show that the samples have much higher silica condensation degree than the ones synthesized at relatively low temperatures. More importantly, these samples exhibit extraordinarily ultra-low dielectric constant (k). For example, ordered mesoporous silica of SBA-15 synthesized at 200 degrees C gives k value as low as 1.31, which is interpreted by a collaborative effect of large pore volume with high silica condensation degree. These samples with extraordinarily ultra-low dielectric constants would be potentially important for applications of superior insulators in electronic industry.
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