Structure and tribological performance of helium-implanted layer on Ti6Al4V alloy by plasma-based ion implantation

Li Jinlong,Ma Xinxin,Sun Mingren,Song Zhenlun

DOI: https://doi.org/10.1016/j.nimb.2008.11.027

2009-01-01

Abstract:The present paper concentrates on tribological performance of Ti6Al4V alloy treated by helium plasma-based ion implantation with a voltage of −30kV and a dose range of 1, 3, 6 and 9×1017He/cm2. X-ray photoelectron spectroscopy (XPS), Transmission electron microscopy (TEM) and Atomic force microscopy (AFM) were used to characterize composition, structure and surface morphology, respectively. The variation of hardness with indenting depth was measured and tribological performance was evaluated. The uniform cavities with a diameter of several nanometers are formed in the helium-implanted layer on Ti6Al4V alloy. Helium implantation enhances the ingress of O, C and N and produces TiO2, Al2O3, TiC, TiN in the near surface layer on their removal from the vacuum and exposure to normal atmospheric condition. In the near surface layer, the hardness of implanted samples increases remarkably comparing with the untreated sample, and the maximum peak increasing factor is up to 2.9 for the sample implanted with 3×1017He/cm2. A decrease in surface roughness, resulting from the leveling effect of sputtering and re-deposition during implantation, has also been observed. Comparing with the untreated sample, implanted samples have a good wear resistance property. And the maximum increase in wear resistance reaches over seven times that of the untreated one for the sample implanted with 3×1017 He/cm2. The wear mechanism of implanted samples is abrasive-dominated.