Observation of Ion-Beam-Induced Transformation in Polyimide Films by Fourier-Transform Infrared-Spectroscopy

D XU,XL XU,GD DU,ZX LIN,R WANG,SC ZOU
DOI: https://doi.org/10.1002/pssa.2211360216
1993-01-01
Abstract:By means of Fourier transform infrared spectroscopy, an ion-beam-induced structural transformation in aromatic polyimide (PI) films is observed. A quantitative evaluation approach is proposed, based on careful experimental considerations in both organic film preparations and ion implantations, to find out the detailed process of degradation for this macromolecular solid. The subtle difference between the structural modification during the low-dose range and that during high-dose range is believed to be distinguished. The analysis also shows that some aromatic rings may survive implantation and play an important role in the formation of PI films under high-dose irradiation.
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