Room temperature mass production of carbon nanotube field emission micro-cathode arrays using electroplating of a CNT/Ni composite followed by micro-machining

Min Deng,Guifu Ding,Yan Wang,Xuemei Cui,Hong Wang,Faheng Zang,Huiqing Wu
DOI: https://doi.org/10.1016/j.vacuum.2010.12.005
IF: 4
2011-01-01
Vacuum
Abstract:A room temperature fabrication method for the mass production of carbon nanotube (CNT) field emission micro-cathode arrays is reported. The technique combines electroplating of a CNT/Ni composite and micro-machining. This method combines the advantages of direct growth and screen printing conventionally used to fabricate such structures and avoids their disadvantages. Due to its integration and room temperature processing, the technique is proven to be advantageous in mass production and low cost. Results of field emission testing show that the CNT micro-cathodes have excellent field-emission properties, such as high current density (15.7 mA/cm2), field enhancement factor (2.4 × 106/cm), and good stability (109 h for 10% degradation of current density from 400 μA/cm2).
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