Observation of the Birefringence of Intermediate-Density Gratings

B Zhao,RH Fang,ZY Cao,HM Xie,A Asundi
DOI: https://doi.org/10.1088/1464-4258/6/2/003
2003-01-01
Abstract:An investigation into the observed weak birefringence of intermediate-density gratings is analysed and discussed in this paper. In the first part, the diffracted image of a birefringent sample obtained with a high-NA (numerical aperture) lens is formulated. Experiments using a conventional polarizing microscope with a high-NA condenser are carried out. The experimental result is compared to the simulation, and found to be in good general agreement. It is shown that the diffracted dark-field image is very sensitive to the sample birefringence. In the second part, a study of the image characteristics of replicated intermediate-density transmission gratings observed under the microscope is performed. It is found that the grating images exhibit weakly birefringent behaviour.
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