The Micro-Nanoformability of Pt-based Metallic Glass and the Nanoforming of Three-Dimensional Structures

Y Saotome,K Imai,S Shioda,S Shimizu,T Zhang,A Inoue
DOI: https://doi.org/10.1016/s0966-9795(02)00135-8
IF: 4.075
2002-01-01
Intermetallics
Abstract:Pt48.75Pd9.75Cu19.5P22 amorphous alloy exhibits obvious glass transition behavior at a temperature of Tg=502 K, which is below the crystallization temperature Tx=588 K, and develops a supercooled liquid state in a wide temperature range of ΔTx (=Tx−Tg)=86 K. The present paper investigates the macroscopic and microscopic deformation behavior of the material and the possibility of micro-nano forming as a fabrication method and material for nano-devices. On a macroscopic scale, the material exhibits a Newtonian viscous flow in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, we fabricated V-grooved micro dies of (100) Si by a silicon process. The V-groove dies are from 100 nm to 1 μm wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micro-nanomaterials for micro-nano devices.
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