Design of Chirped Mo/Si Multilayer Mirror in the Extreme Ultraviolet Region

Rui Chen,Fengli Wang,Zhanshan Wang
DOI: https://doi.org/10.1016/j.ijleo.2011.10.036
IF: 2.56
2008-01-01
Chinese Optics Letters
Abstract:The chirped Mo/Si multilayer mirror in the extreme ultraviolet region is designed to obtain sub-femtosecond pulses from high-order harmonics. Numerical simulations of temporal profile of the pulses are made for superposition of incident high-order harmonics and that of reflected ones by the chirped multilayer mirror. The normal incidence reflectivity and chirp in the wavelength range of 12.5 - 16.5 nm are 6.7% +/- 0.5% and -3617 +/- 171 as(2), respectively. Simulation results indicate that the designed chirped multilayer mirror can be used for producing 104-as pulses.
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