Fabrication of periodical micro-stripe structure of polyimide by laser interference induced forward transfer technique
Huijuan Shen,Yaode Wang,Liang Cao,Ying Xie,Ying Wang,Qinhan Zhang,Wenxiao Zhang,Shenzhi Wang,Zhuang Han,Xiaona Zhu,Miaomiao Yu,Ri Liu,Mingyan Gao,Changli Li,Zhankun Weng,Zuobin Wang
DOI: https://doi.org/10.1016/j.apsusc.2020.148466
IF: 6.7
2021-03-01
Applied Surface Science
Abstract:Laser induced forward transfer technology has been reported to print various patterns of 2D and 3D structures in microfabrication for its fascinating characteristics such as non-contact and simple fabrication process. However, the efficiency and throughput are the drawback especially for manufacture of periodical polymer micro-stripes. Here, we proposed a laser interference induced forward transfer (LIIFT) technique, which could produce periodical polymer micro-stripes with high efficiency. The experiment results showed that the good micro-stripe of the polyimide (PI) had been transferred from the PI film, in which the thickness of the PI film, the laser fluence and the pulse number were ~1.2 µm, 39 mJ·cm−2 and 50, respectively. In addition, the relationship of the micro-stripes was systematically analyzed with the laser fluence, the pulse number and the thickness of donor film, respectively. Furthermore, the Fourier transform infrared(FT-IR)spectra showed that these characteristic valleys of the micro-stripe were coincident with those of the PI film, indicating that the micro-stripes transferred were not changed for their composition during the laser processing. Finally, the transferring process was discussed to analyze the formation of the transferred micro-stripes.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films