Optical readout uncooled infrared imaging detector using knife-edge filter operation

Q. Zhang,Z. Miao,Z. Guo,F. Dong,Z. Xiong,X. Wu,D. Chen,C. Li,B. Jiao
DOI: https://doi.org/10.1007/s11801-007-7014-2
2007-01-01
Optoelectronics Letters
Abstract:An optical readout uncooled infrared (IR) imaging detector of bimaterial cantilever array using knife-edge filter operation (KEFO) is demonstrated. The angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10 −5 degree. A deformation magnifying substrate-free micro-cantilever unit with multi-fold interval metallized legs is specially designed and modeled. A FPA with 160 × 160 pixels is fabricated and thermal images with noise equivalent temperature difference (NETD) of 400 mK are obtained by this imaging detector.
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