Recent Studies on Erosion Resistance Titanium Alloy Composite Coatings by Magnetron Sputtering Method

Zhang Yanliang,Ge Chao,Zhang Junqiu,Jia Fan,Ma Rongfeng
DOI: https://doi.org/10.3969/j.issn.1002-2090.2012.02.006
2012-01-01
Abstract:In this paper,the basic concept of magnetron sputtering method was reviewed and several typical magnetron sputtering technology such as reactive magnetron sputtering,unbalanced magnetron sputtering and plasma enhanced magnetron sputtering was described.Recent progress in research on erosion resistance titanium alloy composite coatings deposited by magnetron sputtering method was summarized.
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