Analysis of Optimal Deposition Parameters of TiN Coatings and Effect of Working Distance on Surface Quality

DU Jun,ZHANG Ping,ZHAO Jun-jun,CAI Zhi-hai,HAO Gen-gen
DOI: https://doi.org/10.3969/j.issn.1672-1497.2008.01.020
2008-01-01
Abstract:TiN coatings are deposited by multi-arc deposition and the process parameters effects on surface quality are analyzed.Firstly,L16(45) orthogonal experiment is designed to optimize the parameters of TiN coatings,five affecting factors of coating hardness are presented,namely,Ti flux,N2 flux,Ar flux,temperature and bias voltage.Then the effects of distance between target and substrate(working distance) on the surface quality are analyzed.The microstructure,surface morphologies and nano-hardness are observed by means of scanning electron microscopy(SEM) and Nano-indentation.The results show that the nano-hardness of TiN coatings varies greatly with the change of parameters;the effect weight of the five affecting factors follows such an order: Ti flux,Ar flux,bias voltage,temperature and N2 flux,and the optimist parameters are 70 A,10 sccm,40 V,350 ℃,44 sccm respectively.The optimal working distance is about 30 cm in this work.
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