Flexible Integration of Optical Switch with Optical Power Splitting and Attenuating Functions for Optical Fiber-Based Networking Applications

Q. H. Chen,W. G. Wu,Z. Q. Wang,G. Z. Yan,Y. L. Hao
DOI: https://doi.org/10.1016/j.optcom.2008.06.077
IF: 2.4
2008-01-01
Optics Communications
Abstract:A flexible integration of optical switch with optical power splitting and attenuating functions has been proposed to optimally serve optical fiber-based networking applications. In this switch, an etched binary-slope sidewall reflector is electrostatically actuated in and out of the plane to manipulate optical signals between input and output optical fibers. The fabrication process is a simple combination of a bulk-silicon micromachining process and silicon-to-glass anodic bonding where fiber alignment grooves, reflectors and actuators are fabricated on the same silicon substrate. Ball-lensed fibers are assembled with the device to achieve high coupling efficiency. Performances of the fabricated devices are measured and discussed. The switching time is less than 9ms at 31V. The excess loss of the device is less than 3dB and the controllable attenuation range is up to 38dB at 139V, respectively. Moreover, polarization-dependent loss is less than 0.7dB in the whole attenuation and splitting range.
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