High-resolution XRD study of stress-modulated YBCO films with various thicknesses

Jie Xiong,Wenfeng Qin,Xumei Cui,Bowan Tao,Jinlong Tang,Yanrong Li
DOI: https://doi.org/10.1016/j.jcrysgro.2006.11.335
IF: 1.8
2007-01-01
Journal of Crystal Growth
Abstract:High-quality epitaxial YBa2Cu3O7−δ (YBCO) superconducting films with thicknesses between 0.2 and 2μm were fabricated on (00l) LaAlO3 with direct-current sputtering method. The influence of film thickness on the structure and texture was investigated by X-ray diffraction conventional θ–2θ scan and high-resolution reciprocal space mapping (HR-RSM). The films grew with strictly c-axis epitaxial, and no a-axis-oriented growth was observed up to a thickness of 2μm. Lattice parameters of the YBCO films with different thicknesses were extracted from symmetry and asymmetry HR-RSMs. The X-ray lattice parameter method was used to determine the residual stress in YBCO films by measuring the a-, b-, c-axis strains, respectively. The results showed that YBCO films within thinner than 1μm were under compressive stress, which was relieved increasing of film thickness. However, beyond 1μm in thickness, YBCO films exhibited a tensile stress. Based on the experimental analysis, the variety of residual stresses in the films is mainly attributed to oxygen vacancies with thickness of YBCO film increasing.
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