Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold waveguides

keyong chen,xue feng,yidong huang,陈可勇,冯雪,黄翊东
DOI: https://doi.org/10.3788/COL201311.022401
IF: 2.56
2013-01-01
Chinese Optics Letters
Abstract:Surface-plasmon (SP) enhancement of amorphous-silicon-nitride (a-SiNx) light emission with single-layer gold (Au) waveguides is experimentally demonstrated through time-resolved photoluminescence measurement. The a-SiNx active layer with strong steady-state photoluminescence at 560 nm is prepared by plasma-enhanced chemical vapor deposition, and the Au waveguide on the top of the a-SiNx layer is fabricated by magnetron sputtering. The maximum Purcell factor value of similar to 3 is achieved with identified SP resonance of the Au waveguide at similar to 530 nm.
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