Estimation of the number of convergence layers in rigorous coupled-wave analysis

Wen Langfeng,Xiong Wei,Li Guoguang,Chen Shuqiang,Fu Yongqi
DOI: https://doi.org/10.3969/j.issn.2095-2783.2013.01.013
2013-01-01
Abstract:We studied the relationship between the structure parameters of the trapezoidal grating and the number of layers,aming to provide theoretical basis for improving the speed of calculating grating diffraction efficiency by reducing the number of layers. Simulation with the self-developed software proves that in the normal incident,the number of convergence layers of TE and TM decreases with the increasing top width or period.When the duty cycle is less than 0.4,with the duty cycle increasing the number of convergence layers of TE decreases,and then remains unchanged,but the number of convergence layers maximizes when the duty cycle reaches 0.5.According to this relationship,the calculation speed can be improved by reducing the number of convergence layers appropriately.
What problem does this paper attempt to address?