A kind of optical fiber H2 sensor based on Pd-Y alloy nano-film

Han Song,Yi Liu,YouPing Chen,Gang Zhang
DOI: https://doi.org/10.16136/j.joel.2013.03.035
2013-01-01
Abstract:In order to obtain a high sensitivity and stability to hydrogen,an optical fiber sensor based on palladium-yttrium(PdY) allog nano-film is designed and fabricated in this paper.A cleaning process was used to wash a substrate of quartz glass and targets to obtaine good binding performance between film and basement.The 55 nm thick PdY film was deposited on the substrate by the double-target reactive magnetron co-sputterng,in which the atom content of yttrium is 10%.And a 5 nm-thick pure palladium protective layer was deposited on the film at last to prevent it from oxidation.The reflective optical fiber bundle sensor system with a single light source and double light paths was designed and realized.The information containing hydrogen concentration was extracted through a division operation between the testing light path and the reference one.This sensor system was tested by standard gas and dry air.The results show that it exhibits long time stability to dry air and has response time of 343 s,266 s and 187 s to 1.5%,3.0% and 4.0% hydrogen,respectively.Although the sensor has zero drift to the standard gas at different degrees.it shows strong stability and repeatability in response value and increment of zero after three or four cycles of test.
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