Abstract:Acoustic wave scattering and fluid perturbations produced by interactions between incident acoustic wave and confined orifice flow were investigated by a combined numerical solution containing nonlinear flow simulation and linearized acoustic simulation. In flow simulations, the mainstream Reynolds number was fixed at 10,000, which relates to the cooling pipe system of lithography. Turbulent flow fields corresponding to different orifice geometries were solved by an opensource finite volume solver OpenFOAM with Reynolds-averaged Navier-Stokes turbulence model. The turbulence database could efficiently improve the accuracy of subsequent linearized acoustic simulations as the viscosity dissipations were considered. In acoustic simulations, the linearized Navier-Stokes equations were solved by a finite element solver with transformation into frequency domain. The incident acoustic waves with varying frequencies from 500 Hz to 4000 Hz were arranged first at the inlet and then the outlet surfaces, enabling a two-port analysis on the transmission and reflection coefficients of acoustic waves. The numerical setup and the two-port model were well validated by results in literature. Generally, acoustic waves tend to gradually dissipate as their frequencies increase or the opening ratio of the ducted orifice decreases. However, the nonlinear variation in the transmission and reflection coefficients against the frequency variation of the incident acoustic waves could be investigated by increasing the thickness ratio. The acoustically induced fluid perturbations that were characterized by the Q-criterion could form a ring shape vortex structure in the vicinity of the orifice edge and then develop into disk-like packets. When the circumferential shape of the orifice was changed to a square, the attenuation of the incident acoustic waves corresponded to the intensity of the three-dimensionality of the acoustic-induced vortex structures, which indicated a greater energy transfer from the acoustic waves to the fluid perturbations.

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