Abstract:Due to the special fields of aerospace, explosion impact, weapon penetration, and other high-g value acceleration test, the sensor test range and antioverload capability have great requirements. At present, most accelerometer beams with equal Section are used. The existing data prove that the beam structure with variable Section can effectively solve the problem of stress concentration, improve the antioverload capability of acceleration sensor, and increase the system stability through theoretical simulation. This study presents a hybrid-integrated high-precision micro-electromechanical systems (MEMS) ultrahigh-g piezoresistive accelerometer, which is composed of a sensitive structure and an application-specific integrated circuit (ASIC) interface. Based on the traditional constant-section four-beam accelerometer, a variable-section beam is proposed, and the Section size increases linearly with the length of beam. Through finite-element simulation analysis, it is verified that the variable-section beam has the characteristics of reducing stress concentration and can improve the antioverload ability of the accelerometer. The simulation results show that the maximum stress of the structure under 200000 g is 28.34 MPa, and its resonance frequency is 548 kHz. Finally, the processing flow is designed, and the fabrication of MEMS chip is completed. Based on the Taiwan semiconductor manufacturing company (TSMC) 0.35- $mu ext{m}$ process, the ASIC interface is designed and fabricated to process the signal from the sensing element and realize the functions of amplification and filtering. The MEMS chip and ASIC chip are integrated by gold wire bonding, packaged in a stainless-steel shell, and tested by Hopkinson bar. The test results show that the sensitivity of the accelerometer is $0.2747 mu ext{V}$ /g, the nonlinearity is 2.79%, and the full range is 200000 g, and the antioverload capacity is 250000 g.

Research and Application of the Multi-ranged Micro Accelerometer in Artillery Missiles

A Multi-ranged Micro Accelerometer

Study on Anti-Top Over-Loaded Technology of Multirange Micro-Accelerometer

Research on Improving Artillery Firing Accuracy by Using Meteorological Data along Ballistic Trajectory for Artillery Firing

Strap-down microelectromechanical (MEMS) sensors for high-g munition applications

Studies on the Measurement and Stress Analysis of Suspension of Artillery

Vibration reduction performance of an arc tripod structure for firing accuracy improvement

Investigation and experiment of high shock packaging technology for High-G MEMS accelerometer

Study of Multi-ranged Piezoresistive Micro Accelerometer Package Failure under High Overload

The Optimal Design for Anti-high Overload Capacity of Multi-range Micro-acclerometer

Analysis of Dynamic Characteristic of Multi-Ranged Micro Accelerometer

Application of tiny acceleration testing apparatus on the gatling weapon

Modeling and dynamic analysis of artillery barrel-cradle structure with clearance

Study on the coupling calculation method for the launch dynamics of a self-propelled artillery multibody system considering engraving process

Design and Experiment of a Hybrid-Integrated Ultrahigh-g Accelerometer With Variable-Section Beam

Analysis of the Development Direction of Small-medium Caliber Artillery

Numeric Simulation Analysis of Projectile Supplement Mechanism of Artillery

An Analysis for the Effect of Artillery Recoil Shock Vibration on the Measuring and Control Equipment

Influence of clearance between cradle and barrel on nonlinear dynamic response of the artillery system

The reliability of micro-accelerometer in harsh environment

In-Bore Dynamic Measurement and Mechanism Analysis of Multi-Physics Environment for Electromagnetic Railguns