FERROELECTRIC PROPERTIES OF Zr-DOPED Bi3.15ND0.85Ti3O12 THIN FILM DEPOSITED BY A SOL-GEL METHOD
Jun Yu,Jia Li,Yunbo Wang,Gang Peng,Dongyun Guo
DOI: https://doi.org/10.1080/10584580601085693
2006-01-01
Integrated Ferroelectrics
Abstract:ABSTRACT Nd3 +-substituted and Zr4 +-substituted bismuth titanate BNT and BNTZx Bi3.15Nd0.85Ti3-xZrx O 12(BNTZx, x = 0, 2%, 4%, 6%, 8%, 10%) thin films were fabricated on Pt/Ti/SiO2/Si substrates by sol-gel method at 750°C. XRD shows that A-site Nd3 + and B-site Zr4 + substitutions do not destroy the layered structure. The remanent polarization (2Pr) values under the voltage of 12v were 20.2, 22.5, 23.7, 26.4, 21.7 and 17.9 μ c/cm2, respectively, for x = 0, 2%, 4%, 6%, 8%, 10%, with the BNTZ6 film has the maximum 2Pr value. While the BNTZx films had an coercive voltage (Vc) value of 3.5v which was similar to that of the BNT film. The fatigue date shows that the BNTZx films have an inferior fatigue characteristics than the BNT film.