Critical Misfit of Epitaxial Growth Metallic Thin Films

JC Li,W Liu,Q Jiang

2005-01-01

Abstract:The critical misfit of epitaxial growth metallic thin films f(c) was thermodynamically considered. It is found that there exists a competition between the energy of the misfit dislocation of film and non-coherent interface energy of film-substrate. Equilibrium between these energies was present at a critical atomic misfit f(c). When the atomic misfit is larger than the critical value, epitaxial growth does not occur. The critical misfit of the epitaxial growth thin films can be predicted. The results show that f(c) is proportional to the non-coherent interface energy of the film-substrate, and inversely proportional to the elastic modulus and the thickness of the film.