Study on new type MEMS bi-stable electromagnetic actuator

ZHANG Xiao-peng,DAI Xu-han,MIAO Xiao-dan,DING Gui-fu,ZHAO Xiao-lin

DOI: https://doi.org/10.3969/j.issn.1000-9787.2009.06.038

2009-01-01

Abstract:A new type MEMS bi-stable electromagnetic actuator is presented.The parameters of the device are optimized by theoretical analysis and Ansys.The feasibility of the design is also proved.The bulk silicon micromachining and metal-based surface micromachining technology is used to fabricate this actuator.The elasticity coefficient of the device is measured,and so is the bi-stable characteristic of the MEMS micro-magnetic actuator.The results show that the device has good performance of bi-stable actuation,and the response time is short(about 10 ms).